Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5304248 | Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions | David Cheng | 1994-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5304248 | Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions | David Cheng | 1994-04-19 |