Issued Patents 1994
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5348837 | Projection exposure apparatus and pattern forming method for use therewith | Hiroshi Fukuda, Ryoko Yamanaka, Tsutomu Tawa, Seiji Yonezawa | 1994-09-20 |
| 5331369 | Method of forming patterns and apparatus for carrying out the same | Katsunobu Hama, Soichi Katagiri | 1994-07-19 |
| 5316896 | Method of forming a pattern | Hiroshi Fukuda | 1994-05-31 |
| 5305364 | Projection type X-ray lithography apparatus | Kozo Mochiji, Hiroaki Oizumi, Shigeo Moriyama, Shinji Okazaki, Masaaki Itou | 1994-04-19 |
| 5302999 | Illumination method, illumination apparatus and projection exposure apparatus | Yoshitada Oshida, Tutomu Tawa, Yukihiro Shibata, Shigemi Ishii, Minori Noguchi +1 more | 1994-04-12 |
| 5296995 | Method of magnetically recording and reading data, magnetic recording medium, its production method and magnetic recording apparatus | Seiji Yonezawa, Keiji Kataoka, Hajime Fukke, Keizo Kato, Harukazu Miyamoto +3 more | 1994-03-22 |