Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5333495 | Method and apparatus for processing a minute portion of a specimen | Hiroshi Yamaguchi, Makiko Kohno, Toshihiko Nakata | 1994-08-02 |
| 5329333 | Exposure apparatus and method | Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 1994-07-12 |
| 5302999 | Illumination method, illumination apparatus and projection exposure apparatus | Yoshitada Oshida, Tutomu Tawa, Yukihiro Shibata, Shigemi Ishii, Tsuneo Terasawa +1 more | 1994-04-12 |