Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5329333 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka | 1994-07-12 |
| 5302999 | Illumination method, illumination apparatus and projection exposure apparatus | Yoshitada Oshida, Tutomu Tawa, Yukihiro Shibata, Shigemi Ishii, Minori Noguchi +1 more | 1994-04-12 |