Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5329333 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Yasuhiro Yoshitaka, Makoto Murayama | 1994-07-12 |
| 5324953 | Reduced-projection exposure system with chromatic aberration correction system including diffractive lens such as holographic lens | Yasuhiro Yoshitake, Yoshitada Oshida, Yasuhiko Nakayama | 1994-06-28 |