Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5371570 | Refractive/diffractive optical system for broad-band through-the-lens imaging of alignment marks on substrates in stepper machines | G. Michael Morris | 1994-12-06 |
| 5324953 | Reduced-projection exposure system with chromatic aberration correction system including diffractive lens such as holographic lens | Yoshitada Oshida, Masataka Shiba, Yasuhiko Nakayama | 1994-06-28 |