Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5371570 | Refractive/diffractive optical system for broad-band through-the-lens imaging of alignment marks on substrates in stepper machines | Yasuhiro Yoshitake | 1994-12-06 |
| 5349471 | Hybrid refractive/diffractive achromatic lens for optical data storage systems | David B. Kay, Dale Buralli, David Albert Kubalak | 1994-09-20 |