Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5329333 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 1994-07-12 |
| 5324953 | Reduced-projection exposure system with chromatic aberration correction system including diffractive lens such as holographic lens | Yasuhiro Yoshitake, Masataka Shiba, Yasuhiko Nakayama | 1994-06-28 |
| 5302999 | Illumination method, illumination apparatus and projection exposure apparatus | Tutomu Tawa, Yukihiro Shibata, Shigemi Ishii, Minori Noguchi, Tsuneo Terasawa +1 more | 1994-04-12 |