Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5348837 | Projection exposure apparatus and pattern forming method for use therewith | Hiroshi Fukuda, Ryoko Yamanaka, Tsuneo Terasawa, Seiji Yonezawa | 1994-09-20 |
| 5323208 | Projection exposure apparatus | Hiroshi Fukuda, Toshihide Dohi | 1994-06-21 |