Issued Patents 1994
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5362591 | Mask having a phase shifter and method of manufacturing same | Akira Imai, Norio Hasegawa, Toshihiko Tanaka | 1994-11-08 |
| 5348837 | Projection exposure apparatus and pattern forming method for use therewith | Ryoko Yamanaka, Tsutomu Tawa, Tsuneo Terasawa, Seiji Yonezawa | 1994-09-20 |
| 5328784 | Reflection mask, method of producing mask and method of forming pattern using the mask | — | 1994-07-12 |
| 5328807 | Method of forming a pattern | Toshihiko Tanaka, Norio Hasegawa, Toshiaki Yamanaka, Akira Imai, Hiroshi Shiraishi +1 more | 1994-07-12 |
| 5323208 | Projection exposure apparatus | Tsutomu Tawa, Toshihide Dohi | 1994-06-21 |
| 5316896 | Method of forming a pattern | Tsuneo Terasawa | 1994-05-31 |