Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5372916 | X-ray exposure method with an X-ray mask comprising phase shifter sidewalls | Taro Ogawa, Seiichi Murayama, Hiroaki Oizumi, Takashi Soga, Seiji Yamamoto +1 more | 1994-12-13 |
| 5305364 | Projection type X-ray lithography apparatus | Hiroaki Oizumi, Shigeo Moriyama, Shinji Okazaki, Tsuneo Terasawa, Masaaki Itou | 1994-04-19 |