Issued Patents 1994
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356686 | X-ray mask structure | Hidehiko Fujioka, Takeshi Miyachi, Yasuaki Fukuda, Yuji Chiba, Nobutoshi Mizusawa +1 more | 1994-10-18 |
| 5329126 | Apparatus and process for vacuum-holding an object | Mitsuaki Amemiya | 1994-07-12 |
| 5323440 | X-ray lithography apparatus including a dose detectable mask | Shinichi Hara, Mitsuaki Amemiya | 1994-06-21 |
| 5317615 | Exposure apparatus | Ryuichi Ebinuma, Nobutoshi Mizusawa, Takao Kariya, Shigeyuki Suda, Takayuki Hasegawa | 1994-05-31 |
| 5285488 | Exposure apparatus | Yutaka Watanabe, Ryuichi Ebinuma, Nobutoshi Mizusawa, Takao Kariya | 1994-02-08 |
| 5277539 | Substrate conveying apparatus | Shin Matsui, Takao Kariya, Nobutoshi Mizusawa, Ryuichi Ebinuma | 1994-01-11 |
| 5276725 | Exposure system | Eigo Kawakami, Minoru Yoshii | 1994-01-04 |