Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374829 | Vacuum chuck | Eiji Sakamoto, Ryuichi Ebinuma, Mitsuji Marumo | 1994-12-20 |
| 5348457 | Vane-type compressor with at least one suction hole | Hiroyuki Suzuki, Mitsuya Ono | 1994-09-20 |
| 5323440 | X-ray lithography apparatus including a dose detectable mask | Mitsuaki Amemiya, Shunichi Uzawa | 1994-06-21 |