Issued Patents 1994
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5377251 | Exposure apparatus | Nobutoshi Mizusawa, Hiroshi Kurosawa, Koji Uda, Takao Kariya, Shumichi Uzawa | 1994-12-27 |
| 5374829 | Vacuum chuck | Eiji Sakamoto, Shinichi Hara, Mitsuji Marumo | 1994-12-20 |
| 5365561 | Exposure control in an X-ray exposure apparatus | Nobutoshi Mizusawa, Masayuki Suzuki, Shinichirou Uno, Tetsuzo Mori, Hiroshi Kurosawa | 1994-11-15 |
| 5355160 | Recorder having separate recording means and feeding means housings | Masa K. Ozawa, Kunitaka Ozawa, Katsunori Hatanaka, Tetsuo Suzuki, Tetsuzo Mori +1 more | 1994-10-11 |
| 5347561 | X-ray exposure apparatus and semiconductor-device manufacturing method | — | 1994-09-13 |
| 5317615 | Exposure apparatus | Nobutoshi Mizusawa, Takao Kariya, Shigeyuki Suda, Shunichi Uzawa, Takayuki Hasegawa | 1994-05-31 |
| 5285488 | Exposure apparatus | Yutaka Watanabe, Nobutoshi Mizusawa, Shunichi Uzawa, Takao Kariya | 1994-02-08 |
| 5277539 | Substrate conveying apparatus | Shin Matsui, Takao Kariya, Nobutoshi Mizusawa, Shunichi Uzawa | 1994-01-11 |