Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5377251 | Exposure apparatus | Nobutoshi Mizusawa, Ryuichi Ebinuma, Koji Uda, Takao Kariya, Shumichi Uzawa | 1994-12-27 |
| 5365561 | Exposure control in an X-ray exposure apparatus | Ryuichi Ebinuma, Nobutoshi Mizusawa, Masayuki Suzuki, Shinichirou Uno, Tetsuzo Mori | 1994-11-15 |
| 5317142 | Automatic focusing apparatus which removes light reflected by a lower surface of a sample | Hiroaki Noda, Shinichi Dosaka | 1994-05-31 |