Issued Patents 1994
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5377251 | Exposure apparatus | Ryuichi Ebinuma, Hiroshi Kurosawa, Koji Uda, Takao Kariya, Shumichi Uzawa | 1994-12-27 |
| 5365561 | Exposure control in an X-ray exposure apparatus | Ryuichi Ebinuma, Masayuki Suzuki, Shinichirou Uno, Tetsuzo Mori, Hiroshi Kurosawa | 1994-11-15 |
| 5356686 | X-ray mask structure | Hidehiko Fujioka, Takeshi Miyachi, Yasuaki Fukuda, Yuji Chiba, Takao Kariya +1 more | 1994-10-18 |
| 5317615 | Exposure apparatus | Ryuichi Ebinuma, Takao Kariya, Shigeyuki Suda, Shunichi Uzawa, Takayuki Hasegawa | 1994-05-31 |
| 5285488 | Exposure apparatus | Yutaka Watanabe, Ryuichi Ebinuma, Shunichi Uzawa, Takao Kariya | 1994-02-08 |
| 5277539 | Substrate conveying apparatus | Shin Matsui, Takao Kariya, Ryuichi Ebinuma, Shunichi Uzawa | 1994-01-11 |