Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356686 | X-ray mask structure | Hidehiko Fujioka, Takeshi Miyachi, Yuji Chiba, Nobutoshi Mizusawa, Takao Kariya +1 more | 1994-10-18 |
| 5335259 | X-ray exposure apparatus | Masami Hayashida, Yutaka Watanabe | 1994-08-02 |
| 5333167 | Mask structure for x-ray exposure and x-ray exposure device and method using it | Takashi Iizuka | 1994-07-26 |
| 5310603 | Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray | Yutaka Watanabe, Shigetaro Ogura, Takashi Iizuka | 1994-05-10 |