Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5329126 | Apparatus and process for vacuum-holding an object | Shunichi Uzawa | 1994-07-12 |
| 5323440 | X-ray lithography apparatus including a dose detectable mask | Shinichi Hara, Shunichi Uzawa | 1994-06-21 |