Issued Patents 1994
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5369486 | Position detector for detecting the position of an object using a diffraction grating positioned at an angle | Takahiro Matsumoto, Noriyuki Nose, Kenji Saitoh, Masanobu Hasegawa, Koichi Sentoku | 1994-11-29 |
| 5343291 | Method and apparatus for measuring an interval between two objects | Mitsutoshi Ohwada, Masakazu Matsugu, Shigeyuki Suda, Yukichi Niwa, Noriyuki Nose +2 more | 1994-08-30 |
| 5340992 | Apparatus and method of detecting positional relationship using a weighted coefficient | Masakazu Matsugu, Naoto Abe | 1994-08-23 |
| 5333050 | Measuring method and apparatus for meausring the positional relationship of first and second gratings | Noriyuki Nose, Kenji Saitoh, Koichi Sentoku | 1994-07-26 |
| 5327221 | Device for detecting positional relationship between two objects | Kenji Saitoh, Masakazu Matsugu, Shigeyuki Suda, Yukichi Niwa, Ryo Kuroda +3 more | 1994-07-05 |
| 5325176 | Position detecting method and apparatus including Fraunhofer diffraction detector | Shigeyuki Suda, Kenji Saitoh, Masakazu Matsugu, Naoto Abe, Ryo Kuroda | 1994-06-28 |
| 5321502 | Measuring method and measuring apparatus | Takahiro Matsumoto, Kenji Saito, Hiroyasu Nose, Koichi Sentoku, Seiji Takeuchi | 1994-06-14 |
| 5319444 | Position detecting method and apparatus | Kenji Saitoh, Masakazu Matsugu, Yukichi Niwa, Noriyuki Nose, Shigeyuki Suda | 1994-06-07 |
| 5291023 | Position detecting system utilizing a weight coefficient to determine a gravity center of light | Masanobu Hasegawa, Naoto Abe | 1994-03-01 |
| 5276725 | Exposure system | Eigo Kawakami, Shunichi Uzawa | 1994-01-04 |