Issued Patents 1994
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5369486 | Position detector for detecting the position of an object using a diffraction grating positioned at an angle | Takahiro Matsumoto, Minoru Yoshii, Kenji Saitoh, Masanobu Hasegawa, Koichi Sentoku | 1994-11-29 |
| 5343291 | Method and apparatus for measuring an interval between two objects | Mitsutoshi Ohwada, Masakazu Matsugu, Shigeyuki Suda, Minoru Yoshii, Yukichi Niwa +2 more | 1994-08-30 |
| 5333050 | Measuring method and apparatus for meausring the positional relationship of first and second gratings | Kenji Saitoh, Koichi Sentoku, Minoru Yoshii | 1994-07-26 |
| 5327221 | Device for detecting positional relationship between two objects | Kenji Saitoh, Masakazu Matsugu, Shigeyuki Suda, Yukichi Niwa, Ryo Kuroda +3 more | 1994-07-05 |
| 5319444 | Position detecting method and apparatus | Kenji Saitoh, Masakazu Matsugu, Yukichi Niwa, Minoru Yoshii, Shigeyuki Suda | 1994-06-07 |
| 5313272 | Method and apparatus for measuring deviation between patterns on a semiconductor wafer | Kenji Saitoh, Hiroshi Osawa, Masanobu Hasegawa | 1994-05-17 |
| 5294980 | Positioning detecting method and apparatus | Masakazu Matsugu, Kenji Saitoh, Yukichi Niwa, Ryo Kuroda, Shigeyuki Suda | 1994-03-15 |