Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12270645 | High-resolution phase detection method and system based on plane grating laser interferometer | Yu Zhu, Jinchun Hu, Rujin Han, Chang Tian, Ming Zhang +2 more | 2025-04-08 |
| 11022423 | Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system | Yu Zhu, Jinchun Hu, Shengwu Du, Enyao Shang, Ming Zhang +2 more | 2021-06-01 |
| 9903704 | Three-DOF heterodyne grating interferometer displacement measurement system | Yu Zhu, Leijie Wang, Ming Zhang, Zhao Liu, Rong Cheng +10 more | 2018-02-27 |
| 9904183 | Coarse motion and fine motion integrated reticle stage driven by planar motor | Yu Zhu, Ming Zhang, Fan Zhi, Zhao Liu, Rong Cheng +9 more | 2018-02-27 |
| 9885556 | Dual-frequency grating interferometer displacement measurement system | Yu Zhu, Ming Zhang, Leijie Wang, Jinchun Hu, Longmin Chen +3 more | 2018-02-06 |
| 9879979 | Heterodyne grating interferometer displacement measurement system | Ming Zhang, Yu Zhu, Leijie Wang, Jinchun Hu, Longmin Chen +3 more | 2018-01-30 |
| 9869857 | Optical grating phase modulator for laser interference photoetching system | Yu Zhu, Ming Zhang, Leijie Wang, Rong Cheng, Kaiming Yang +5 more | 2018-01-16 |
| 9791789 | Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor | Ming Zhang, Yu Zhu, Fan Zhi, Rong Cheng, Kaiming Yang +9 more | 2017-10-17 |
| 9766054 | Planar motor rotor displacement measuring device and its measuring method | Jinchun Hu, Yu Zhu, Longmin Chen, Kaiming Yang, Ming Zhang +4 more | 2017-09-19 |
| 9752643 | Negative stiffness system for gravity compensation of micropositioner | Yu Zhu, Ming Zhang, Zhao Liu, Rong Cheng, Jing Wang +7 more | 2017-09-05 |
| 9455650 | Two-dimensional locating method of motion platform based on magnetic steel array | Jinchun Hu, Yu Zhu, Jinsong Wang, Ming Zhang, KAI-RONG LIAO +3 more | 2016-09-27 |
| 9310797 | Single degree of freedom vibration isolating device of linear motor and motion control method thereof | Kaiming Yang, Yu Zhu, Dongdong YU, Rong Cheng, Ming Zhang +5 more | 2016-04-12 |
| 9310782 | Method for measuring displacement of planar motor rotor | Yu Zhu, Jinchun Hu, Dengfeng Xu, Yuting Sun, Ming Zhang +2 more | 2016-04-12 |
| 9182217 | Method for measuring displacement of large-range moving platform | Ming Zhang, Yu Zhu, Hao Liu, Yi Jiang, Zhao Liu +4 more | 2015-11-10 |
| 9030648 | Dual wafer stage exchanging system for lithographic device | Yu Zhu, Ming Zhang, Jingsong Wang, Li Tian, Dengfeng Xu +2 more | 2015-05-12 |
| 8958078 | Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space | Ming Zhang, Yu Zhu, Zhao Liu, Jinchun Hu, Dengfeng Xu +2 more | 2015-02-17 |
| 8860927 | Dual-stage exchange system for lithographic apparatus | Yu Zhu, Ming Zhang, Jingsong Wang, Li Tian, Dengfeng Xu +2 more | 2014-10-14 |
| 8836918 | Dual-stage exchange system for lithographic apparatus | Yu Zhu, Ming Zhang, Jingsong Wang, Li Tian, Dengfeng Xu +2 more | 2014-09-16 |
| 8599361 | Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof | Yu Zhu, Ming Zhang, Guang Li, Jinsong Wang, Jinchun Hu +7 more | 2013-12-03 |
| 8284380 | Dual-stage switching system for lithographic machine | Yu Zhu, Ming Zhang, Jinsong Wang, Guang Li, Dengfeng Xu +2 more | 2012-10-09 |
| 8084897 | Micro stage with 6 degrees of freedom | Yu Zhu, Jinsong Wang, Ming Zhang, Guang Li, Dengfeng Xu +2 more | 2011-12-27 |
| 7339289 | Synchronous permanent magnet planar motor | Jinsong Wang, Yu Zhu, Jiayong Cao, Guanghong Duan | 2008-03-04 |
| 7259380 | Scanning mechanism of an ion implanter | Jinsong Wang, Yu Zhu, Jianyong Cao, Guanghong Duan | 2007-08-21 |