Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9030648 | Dual wafer stage exchanging system for lithographic device | Yu Zhu, Ming Zhang, Li Tian, Dengfeng Xu, Wensheng Yin +2 more | 2015-05-12 |
| 8860927 | Dual-stage exchange system for lithographic apparatus | Yu Zhu, Ming Zhang, Li Tian, Dengfeng Xu, Wensheng Yin +2 more | 2014-10-14 |
| 8836918 | Dual-stage exchange system for lithographic apparatus | Yu Zhu, Ming Zhang, Li Tian, Dengfeng Xu, Wensheng Yin +2 more | 2014-09-16 |