Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12270645 | High-resolution phase detection method and system based on plane grating laser interferometer | Yu Zhu, Jinchun Hu, Rujin Han, Chang Tian, Ming Zhang +2 more | 2025-04-08 |
| 11590260 | Methods for treating bioprosthetic tissue using a nucleophile/electrophile in a catalytic system | Jeffrey S. Dove | 2023-02-28 |
| 10532832 | Magnetic levitation reaction sphere | Ming Zhang, Yu Zhu, Anlin Chen, Kaiming Yang, Rong Cheng +4 more | 2020-01-14 |
| 10238771 | Methods for treating bioprosthetic tissue using a nucleophile/electrophile in a catalytic system | Jeffrey S. Dove | 2019-03-26 |
| 9995569 | Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage | Yu Zhu, Ming Zhang, Anlin Chen, Rong Cheng, Kaiming Yang +6 more | 2018-06-12 |
| 9903704 | Three-DOF heterodyne grating interferometer displacement measurement system | Yu Zhu, Leijie Wang, Ming Zhang, Zhao Liu, Rong Cheng +10 more | 2018-02-27 |
| 9885556 | Dual-frequency grating interferometer displacement measurement system | Yu Zhu, Ming Zhang, Leijie Wang, Jinchun Hu, Longmin Chen +3 more | 2018-02-06 |
| 9879979 | Heterodyne grating interferometer displacement measurement system | Ming Zhang, Yu Zhu, Leijie Wang, Jinchun Hu, Longmin Chen +3 more | 2018-01-30 |
| 9869857 | Optical grating phase modulator for laser interference photoetching system | Yu Zhu, Ming Zhang, Leijie Wang, Rong Cheng, Kaiming Yang +5 more | 2018-01-16 |
| 9766054 | Planar motor rotor displacement measuring device and its measuring method | Jinchun Hu, Yu Zhu, Wensheng Yin, Longmin Chen, Kaiming Yang +4 more | 2017-09-19 |
| 9752643 | Negative stiffness system for gravity compensation of micropositioner | Yu Zhu, Ming Zhang, Zhao Liu, Rong Cheng, Jing Wang +7 more | 2017-09-05 |
| 9547245 | Dual wafer stage switching system for a lithography machine | Yu Zhu, Yaying Chen, Ming Zhang, Jinsong Wang | 2017-01-17 |
| 9455650 | Two-dimensional locating method of motion platform based on magnetic steel array | Jinchun Hu, Yu Zhu, Jinsong Wang, Ming Zhang, KAI-RONG LIAO +3 more | 2016-09-27 |
| 9310797 | Single degree of freedom vibration isolating device of linear motor and motion control method thereof | Kaiming Yang, Yu Zhu, Dongdong YU, Rong Cheng, Ming Zhang +5 more | 2016-04-12 |
| 9310782 | Method for measuring displacement of planar motor rotor | Yu Zhu, Jinchun Hu, Yuting Sun, Wensheng Yin, Ming Zhang +2 more | 2016-04-12 |
| 9182217 | Method for measuring displacement of large-range moving platform | Ming Zhang, Yu Zhu, Hao Liu, Yi Jiang, Zhao Liu +4 more | 2015-11-10 |
| 9030648 | Dual wafer stage exchanging system for lithographic device | Yu Zhu, Ming Zhang, Jingsong Wang, Li Tian, Wensheng Yin +2 more | 2015-05-12 |
| 8958078 | Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space | Ming Zhang, Yu Zhu, Zhao Liu, Jinchun Hu, Kaiming Yang +2 more | 2015-02-17 |
| 8860927 | Dual-stage exchange system for lithographic apparatus | Yu Zhu, Ming Zhang, Jingsong Wang, Li Tian, Wensheng Yin +2 more | 2014-10-14 |
| 8836918 | Dual-stage exchange system for lithographic apparatus | Yu Zhu, Ming Zhang, Jingsong Wang, Li Tian, Wensheng Yin +2 more | 2014-09-16 |
| 8284380 | Dual-stage switching system for lithographic machine | Yu Zhu, Ming Zhang, Jinsong Wang, Guang Li, Wensheng Yin +2 more | 2012-10-09 |
| 8084897 | Micro stage with 6 degrees of freedom | Yu Zhu, Jinsong Wang, Ming Zhang, Guang Li, Wensheng Yin +2 more | 2011-12-27 |
| 7651762 | Methods and devices using a shrinkable support for porous monolithic materials | Robert Lee Grenz | 2010-01-26 |
| 7595350 | Ultraporous sol gel monoliths | — | 2009-09-29 |
| 7439272 | Ultraporous sol gel monoliths | — | 2008-10-21 |