Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393127 | Exposure light beam phase measurement method in laser interference photolithography, and photolithography system | Yu Zhu, Ming Zhang, Jitao Xu, Rong Cheng, Xin Li +2 more | 2025-08-19 |
| 12346030 | Device and method for regulating and controlling incident angle of light beam in laser interference lithography | Yu Zhu, Ming Zhang, Rong Cheng, Yuezhu Yang, Xin Li +1 more | 2025-07-01 |
| 12332053 | Heterodyne grating interferometry system based on secondary diffraction | Yu Zhu, Ziwen Guo, Ming Zhang, Rong Cheng, Weinan Ye +1 more | 2025-06-17 |
| 12189300 | Scanning interference lithographic system | Yu Zhu, Ming Zhang, Jitao Xu, Rong Cheng, Jiankun Hao +4 more | 2025-01-07 |
| 12064600 | Acoustic method for precisely controlling and metering the manual injection dosage | Yongxin Wang, Jucai Fang, Yanling Liu, Weidong Zhang, Wuyi Ming +1 more | 2024-08-20 |
| 12038690 | Laser interference photolithography system | Yu Zhu, Ming Zhang, Jitao Xu, Xin Li, Rong Cheng +2 more | 2024-07-16 |
| 11990273 | Manufacturing method of thin-film power inductor and thin-film power inductor | Quan Zhu, Yangdong YU, Gan Liu | 2024-05-21 |
| 11940349 | Plane grating calibration system | Ming Zhang, Yu Zhu, Jiankun Hao, Xin Li, Rong Cheng +2 more | 2024-03-26 |
| 11703361 | Five-degree-of-freedom heterodyne grating interferometry system | Ming Zhang, Yu Zhu, Fuzhong Yang, Rong Cheng, Xin Li +2 more | 2023-07-18 |
| 11525673 | Five-degree-of-freedom heterodyne grating interferometry system | Yu Zhu, Ming Zhang, Weinan Ye, Fuzhong Yang, Yizhou XIA +1 more | 2022-12-13 |
| 11307018 | Two-degree-of-freedom heterodyne grating interferometry measurement system | Yu Zhu, Ming Zhang, Fuzhong Yang, Rong Cheng, Xin Li +2 more | 2022-04-19 |
| 11228113 | Wide-beam planar backfire and bidirectional circularly-polarized antenna | Wenjun Lv, Yun Shao, Zhuang Li, Weili Zhang, Shanshan Gu +1 more | 2022-01-18 |
| 9903704 | Three-DOF heterodyne grating interferometer displacement measurement system | Yu Zhu, Ming Zhang, Zhao Liu, Rong Cheng, Kaiming Yang +10 more | 2018-02-27 |
| 9885556 | Dual-frequency grating interferometer displacement measurement system | Yu Zhu, Ming Zhang, Jinchun Hu, Longmin Chen, Kaiming Yang +3 more | 2018-02-06 |
| 9879979 | Heterodyne grating interferometer displacement measurement system | Ming Zhang, Yu Zhu, Jinchun Hu, Longmin Chen, Kaiming Yang +3 more | 2018-01-30 |
| 9869857 | Optical grating phase modulator for laser interference photoetching system | Yu Zhu, Ming Zhang, Rong Cheng, Kaiming Yang, Zhao Liu +5 more | 2018-01-16 |
| 9109600 | Two-stage medium-pressure screw-type air compressor set | Jiangwei Wu, Jiongyan Zhang, Zhongping Zhuang, Xibo Yin, Gang Chen +1 more | 2015-08-18 |