Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332053 | Heterodyne grating interferometry system based on secondary diffraction | Yu Zhu, Leijie Wang, Ziwen Guo, Ming Zhang, Rong Cheng +1 more | 2025-06-17 |
| 11703361 | Five-degree-of-freedom heterodyne grating interferometry system | Ming Zhang, Yu Zhu, Fuzhong Yang, Leijie Wang, Rong Cheng +2 more | 2023-07-18 |
| 11525673 | Five-degree-of-freedom heterodyne grating interferometry system | Yu Zhu, Ming Zhang, Leijie Wang, Fuzhong Yang, Yizhou XIA +1 more | 2022-12-13 |
| 11307018 | Two-degree-of-freedom heterodyne grating interferometry measurement system | Yu Zhu, Ming Zhang, Leijie Wang, Fuzhong Yang, Rong Cheng +2 more | 2022-04-19 |
| 9903704 | Three-DOF heterodyne grating interferometer displacement measurement system | Yu Zhu, Leijie Wang, Ming Zhang, Zhao Liu, Rong Cheng +10 more | 2018-02-27 |
| 9904183 | Coarse motion and fine motion integrated reticle stage driven by planar motor | Yu Zhu, Ming Zhang, Fan Zhi, Zhao Liu, Rong Cheng +9 more | 2018-02-27 |
| 9791789 | Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor | Ming Zhang, Yu Zhu, Fan Zhi, Rong Cheng, Kaiming Yang +9 more | 2017-10-17 |