Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393127 | Exposure light beam phase measurement method in laser interference photolithography, and photolithography system | Leijie Wang, Yu Zhu, Ming Zhang, Jitao Xu, Xin Li +2 more | 2025-08-19 |
| 12346030 | Device and method for regulating and controlling incident angle of light beam in laser interference lithography | Leijie Wang, Yu Zhu, Ming Zhang, Yuezhu Yang, Xin Li +1 more | 2025-07-01 |
| 12332053 | Heterodyne grating interferometry system based on secondary diffraction | Yu Zhu, Leijie Wang, Ziwen Guo, Ming Zhang, Weinan Ye +1 more | 2025-06-17 |
| 12270645 | High-resolution phase detection method and system based on plane grating laser interferometer | Yu Zhu, Jinchun Hu, Rujin Han, Chang Tian, Ming Zhang +2 more | 2025-04-08 |
| 12189300 | Scanning interference lithographic system | Leijie Wang, Yu Zhu, Ming Zhang, Jitao Xu, Jiankun Hao +4 more | 2025-01-07 |
| 12169367 | Vertical motion protection method and device based on dual-stage motion system of photolithography machine | Kaiming Yang, Yu Zhu, Ming Zhang, Sheng LEI, Tao Liu +2 more | 2024-12-17 |
| 12038690 | Laser interference photolithography system | Leijie Wang, Yu Zhu, Ming Zhang, Jitao Xu, Xin Li +2 more | 2024-07-16 |
| 11940349 | Plane grating calibration system | Leijie Wang, Ming Zhang, Yu Zhu, Jiankun Hao, Xin Li +2 more | 2024-03-26 |
| 11703361 | Five-degree-of-freedom heterodyne grating interferometry system | Ming Zhang, Yu Zhu, Fuzhong Yang, Leijie Wang, Xin Li +2 more | 2023-07-18 |
| 11481927 | Method and apparatus for determining text color | Ziyan Zhong, Yu Hao, Muwei ZHAO, Wenqian Yuan | 2022-10-25 |
| 11307018 | Two-degree-of-freedom heterodyne grating interferometry measurement system | Yu Zhu, Ming Zhang, Leijie Wang, Fuzhong Yang, Xin Li +2 more | 2022-04-19 |
| 11132114 | Method and apparatus for generating customized visualization component | Yu Hao, Muwei ZHAO, Ziyan Zhong | 2021-09-28 |
| 11022423 | Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system | Yu Zhu, Jinchun Hu, Shengwu Du, Enyao Shang, Ming Zhang +2 more | 2021-06-01 |
| 10597172 | Magnetic-fluid momentum sphere | Yu Zhu, Anlin Chen, Ming Zhang, Kaiming Yang | 2020-03-24 |
| 10532832 | Magnetic levitation reaction sphere | Ming Zhang, Yu Zhu, Anlin Chen, Kaiming Yang, Feng Liu +4 more | 2020-01-14 |
| 9995569 | Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage | Yu Zhu, Ming Zhang, Anlin Chen, Kaiming Yang, Feng Liu +6 more | 2018-06-12 |
| 9903704 | Three-DOF heterodyne grating interferometer displacement measurement system | Yu Zhu, Leijie Wang, Ming Zhang, Zhao Liu, Kaiming Yang +10 more | 2018-02-27 |
| 9904183 | Coarse motion and fine motion integrated reticle stage driven by planar motor | Yu Zhu, Ming Zhang, Fan Zhi, Zhao Liu, Kaiming Yang +9 more | 2018-02-27 |
| 9869857 | Optical grating phase modulator for laser interference photoetching system | Yu Zhu, Ming Zhang, Leijie Wang, Kaiming Yang, Zhao Liu +5 more | 2018-01-16 |
| 9791789 | Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor | Ming Zhang, Yu Zhu, Fan Zhi, Kaiming Yang, Zhao Liu +9 more | 2017-10-17 |
| 9752643 | Negative stiffness system for gravity compensation of micropositioner | Yu Zhu, Ming Zhang, Zhao Liu, Jing Wang, Li Tian +7 more | 2017-09-05 |
| 9310797 | Single degree of freedom vibration isolating device of linear motor and motion control method thereof | Kaiming Yang, Yu Zhu, Dongdong YU, Ming Zhang, Xin Li +5 more | 2016-04-12 |
| 8908687 | Method for transmitting policy information between network equipment | Qingquan Shi, Yuelin HU | 2014-12-09 |
| 8847884 | Electronic device and method for offering services according to user facial expressions | HAI-SHENG LI, Hui-Ling Ru, CHIH-SAN CHIANG | 2014-09-30 |
| 8756679 | Electronic device and method for unlocking locked operating system | Jin Li, HAI-SHENG LI, CHIH-SAN CHIANG | 2014-06-17 |