Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393127 | Exposure light beam phase measurement method in laser interference photolithography, and photolithography system | Leijie Wang, Yu Zhu, Jitao Xu, Rong Cheng, Xin Li +2 more | 2025-08-19 |
| 12346030 | Device and method for regulating and controlling incident angle of light beam in laser interference lithography | Leijie Wang, Yu Zhu, Rong Cheng, Yuezhu Yang, Xin Li +1 more | 2025-07-01 |
| 12332053 | Heterodyne grating interferometry system based on secondary diffraction | Yu Zhu, Leijie Wang, Ziwen Guo, Rong Cheng, Weinan Ye +1 more | 2025-06-17 |
| 12270645 | High-resolution phase detection method and system based on plane grating laser interferometer | Yu Zhu, Jinchun Hu, Rujin Han, Chang Tian, Wensheng Yin +2 more | 2025-04-08 |
| 12189300 | Scanning interference lithographic system | Leijie Wang, Yu Zhu, Jitao Xu, Rong Cheng, Jiankun Hao +4 more | 2025-01-07 |
| 12169367 | Vertical motion protection method and device based on dual-stage motion system of photolithography machine | Kaiming Yang, Rong Cheng, Yu Zhu, Sheng LEI, Tao Liu +2 more | 2024-12-17 |
| 12038690 | Laser interference photolithography system | Leijie Wang, Yu Zhu, Jitao Xu, Xin Li, Rong Cheng +2 more | 2024-07-16 |
| 11940349 | Plane grating calibration system | Leijie Wang, Yu Zhu, Jiankun Hao, Xin Li, Rong Cheng +2 more | 2024-03-26 |
| 11879296 | Blade cap force modulation system for a drill bit | Chris Cheng, Jiaqing Yu, Qi Peng, Xiaohua Ke | 2024-01-23 |
| 11808090 | Force modulation system for a drill bit | Chris Cheng, Jiaqing Yu, Xiongwen Yang | 2023-11-07 |
| 11703361 | Five-degree-of-freedom heterodyne grating interferometry system | Yu Zhu, Fuzhong Yang, Leijie Wang, Rong Cheng, Xin Li +2 more | 2023-07-18 |
| 11702891 | Force modulation system with an elastic force member for downhole conditions | Lei Zhao, Chris Cheng, Jiaxiang Ren, Chengxi Li | 2023-07-18 |
| 11525673 | Five-degree-of-freedom heterodyne grating interferometry system | Yu Zhu, Leijie Wang, Weinan Ye, Fuzhong Yang, Yizhou XIA +1 more | 2022-12-13 |
| 11499378 | Blade cap force modulation system for a drill bit | Chris Cheng, Jiaqing Yu, Qi Peng, Xiaohua Ke | 2022-11-15 |
| 11499377 | Force modulation system for a drill bit | Chris Cheng, Jiaqing Yu, Xiongwen Yang | 2022-11-15 |
| 11307018 | Two-degree-of-freedom heterodyne grating interferometry measurement system | Yu Zhu, Leijie Wang, Fuzhong Yang, Rong Cheng, Xin Li +2 more | 2022-04-19 |
| 11022423 | Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system | Yu Zhu, Jinchun Hu, Shengwu Du, Enyao Shang, Wensheng Yin +2 more | 2021-06-01 |
| 10830020 | Tool assembly with a fluidic agitator and a coating | Jianhui Xu, Chris Cheng, YU-LIN LIU, Xiongwen Yang | 2020-11-10 |
| 10753167 | Tool assembly with a fluidic agitator | Chris Cheng, Dengxiang Bai, Xiongwen Yang, Kuangsheng Zhang, Yuming Wang +1 more | 2020-08-25 |
| 10597172 | Magnetic-fluid momentum sphere | Yu Zhu, Anlin Chen, Kaiming Yang, Rong Cheng | 2020-03-24 |
| 10532832 | Magnetic levitation reaction sphere | Yu Zhu, Anlin Chen, Kaiming Yang, Rong Cheng, Feng Liu +4 more | 2020-01-14 |
| 10450819 | Tool assembly with a fluidic agitator | Chris Cheng, Dengxiang Bai, Xiongwen Yang, Kuangsheng Zhang, Yuming Wang +1 more | 2019-10-22 |
| 9995569 | Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage | Yu Zhu, Anlin Chen, Rong Cheng, Kaiming Yang, Feng Liu +6 more | 2018-06-12 |
| 9904183 | Coarse motion and fine motion integrated reticle stage driven by planar motor | Yu Zhu, Fan Zhi, Zhao Liu, Rong Cheng, Kaiming Yang +9 more | 2018-02-27 |
| 9903704 | Three-DOF heterodyne grating interferometer displacement measurement system | Yu Zhu, Leijie Wang, Zhao Liu, Rong Cheng, Kaiming Yang +10 more | 2018-02-27 |