Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885556 | Dual-frequency grating interferometer displacement measurement system | Yu Zhu, Leijie Wang, Jinchun Hu, Longmin Chen, Kaiming Yang +3 more | 2018-02-06 |
| 9879979 | Heterodyne grating interferometer displacement measurement system | Yu Zhu, Leijie Wang, Jinchun Hu, Longmin Chen, Kaiming Yang +3 more | 2018-01-30 |
| 9869857 | Optical grating phase modulator for laser interference photoetching system | Yu Zhu, Leijie Wang, Rong Cheng, Kaiming Yang, Zhao Liu +5 more | 2018-01-16 |
| 9791789 | Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor | Yu Zhu, Fan Zhi, Rong Cheng, Kaiming Yang, Zhao Liu +9 more | 2017-10-17 |
| 9766054 | Planar motor rotor displacement measuring device and its measuring method | Jinchun Hu, Yu Zhu, Wensheng Yin, Longmin Chen, Kaiming Yang +4 more | 2017-09-19 |
| 9752643 | Negative stiffness system for gravity compensation of micropositioner | Yu Zhu, Zhao Liu, Rong Cheng, Jing Wang, Li Tian +7 more | 2017-09-05 |
| 9547245 | Dual wafer stage switching system for a lithography machine | Yu Zhu, Yaying Chen, Dengfeng Xu, Jinsong Wang | 2017-01-17 |
| 9455650 | Two-dimensional locating method of motion platform based on magnetic steel array | Jinchun Hu, Yu Zhu, Jinsong Wang, KAI-RONG LIAO, Kaiming Yang +3 more | 2016-09-27 |
| 9310782 | Method for measuring displacement of planar motor rotor | Yu Zhu, Jinchun Hu, Dengfeng Xu, Yuting Sun, Wensheng Yin +2 more | 2016-04-12 |
| 9310797 | Single degree of freedom vibration isolating device of linear motor and motion control method thereof | Kaiming Yang, Yu Zhu, Dongdong YU, Rong Cheng, Xin Li +5 more | 2016-04-12 |
| 9182217 | Method for measuring displacement of large-range moving platform | Yu Zhu, Hao Liu, Yi Jiang, Zhao Liu, Kaiming Yang +4 more | 2015-11-10 |
| 9030648 | Dual wafer stage exchanging system for lithographic device | Yu Zhu, Jingsong Wang, Li Tian, Dengfeng Xu, Wensheng Yin +2 more | 2015-05-12 |
| 8979458 | Heat dissipation device having fastener | Jian Sun, Xi Shen, Wei-Hsiang Chang | 2015-03-17 |
| 8958078 | Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space | Yu Zhu, Zhao Liu, Jinchun Hu, Dengfeng Xu, Kaiming Yang +2 more | 2015-02-17 |
| 8860927 | Dual-stage exchange system for lithographic apparatus | Yu Zhu, Jingsong Wang, Li Tian, Dengfeng Xu, Wensheng Yin +2 more | 2014-10-14 |
| 8836918 | Dual-stage exchange system for lithographic apparatus | Yu Zhu, Jingsong Wang, Li Tian, Dengfeng Xu, Wensheng Yin +2 more | 2014-09-16 |
| 8599361 | Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof | Yu Zhu, Guang Li, Jinsong Wang, Jinchun Hu, Wensheng Yin +7 more | 2013-12-03 |
| 8578605 | Manufacturing method of a heat dissipation device with guiding lines and soldered heat pipes | Wei-Hsiang Chang, NIEN-TIEN CHENG | 2013-11-12 |
| 8459336 | Heat dissipation device with guiding line and soldered heat pipe | Wei-Hsiang Chang, NIEN-TIEN CHENG | 2013-06-11 |
| 8284380 | Dual-stage switching system for lithographic machine | Yu Zhu, Jinsong Wang, Guang Li, Dengfeng Xu, Wensheng Yin +2 more | 2012-10-09 |
| 8245763 | Heat dissipation device with guilding lines and soldered heat pipes and manufacturing method thereof | Wei-Hsiang Chang, NIEN-TIEN CHENG | 2012-08-21 |
| 8084897 | Micro stage with 6 degrees of freedom | Yu Zhu, Jinsong Wang, Guang Li, Dengfeng Xu, Wensheng Yin +2 more | 2011-12-27 |