Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9547245 | Dual wafer stage switching system for a lithography machine | Yu Zhu, Ming Zhang, Dengfeng Xu, Jinsong Wang | 2017-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9547245 | Dual wafer stage switching system for a lithography machine | Yu Zhu, Ming Zhang, Dengfeng Xu, Jinsong Wang | 2017-01-17 |