Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455650 | Two-dimensional locating method of motion platform based on magnetic steel array | Jinchun Hu, Yu Zhu, Jinsong Wang, Ming Zhang, KAI-RONG LIAO +3 more | 2016-09-27 |
| 9030648 | Dual wafer stage exchanging system for lithographic device | Yu Zhu, Ming Zhang, Jingsong Wang, Li Tian, Dengfeng Xu +2 more | 2015-05-12 |
| 8860927 | Dual-stage exchange system for lithographic apparatus | Yu Zhu, Ming Zhang, Jingsong Wang, Li Tian, Dengfeng Xu +2 more | 2014-10-14 |
| 8836918 | Dual-stage exchange system for lithographic apparatus | Yu Zhu, Ming Zhang, Jingsong Wang, Li Tian, Dengfeng Xu +2 more | 2014-09-16 |
| 8599361 | Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof | Yu Zhu, Ming Zhang, Guang Li, Jinsong Wang, Jinchun Hu +7 more | 2013-12-03 |
| 8284380 | Dual-stage switching system for lithographic machine | Yu Zhu, Ming Zhang, Jinsong Wang, Guang Li, Dengfeng Xu +2 more | 2012-10-09 |
| 8084897 | Micro stage with 6 degrees of freedom | Yu Zhu, Jinsong Wang, Ming Zhang, Guang Li, Dengfeng Xu +2 more | 2011-12-27 |
| 7339289 | Synchronous permanent magnet planar motor | Jinsong Wang, Yu Zhu, Jiayong Cao, Wensheng Yin | 2008-03-04 |
| 7259380 | Scanning mechanism of an ion implanter | Jinsong Wang, Yu Zhu, Jianyong Cao, Wensheng Yin | 2007-08-21 |
| 6575676 | Parallel structure of a spatial 3-axis machine tool with three degrees-of-freedom | Jinsong Wang, Xin Liu, Peiqing Ye | 2003-06-10 |
| 6402444 | Type of parallel machine tool frame driven by slider and extensible strut | Jinsong Wang, Xiaoqiang Tang | 2002-06-11 |