Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8251011 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Chishio Koshimizu, Fumihiko Higuchi, Akitaka Shimizu +5 more | 2012-08-28 |
| 7682982 | Plasma processing apparatus and control method thereof | Naoto Sagae, Hiroshi Tsuchiya, Hideo Kato, Ryuji Ohtani | 2010-03-23 |
| 7527016 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Chishio Koshimizu, Fumihiko Higuchi, Akitaka Shimizu +5 more | 2009-05-05 |
| 7244475 | Plasma treatment apparatus and control method thereof | — | 2007-07-17 |
| 7025857 | Plasma treatment apparatus, matching box, impedance matching device, and coupler | — | 2006-04-11 |