Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7682982 | Plasma processing apparatus and control method thereof | Hiroshi Tsuchiya, Tsutomu Higashiura, Hideo Kato, Ryuji Ohtani | 2010-03-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7682982 | Plasma processing apparatus and control method thereof | Hiroshi Tsuchiya, Tsutomu Higashiura, Hideo Kato, Ryuji Ohtani | 2010-03-23 |