Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777425 | Method of processing substrate | Masahiro Tabata, Sho Kumakura, Ryuichi Asako, Shinya Ishikawa, Masanobu Honda | 2020-09-15 |
| 10777422 | Method for processing target object | Yoshihide Kihara, Masanobu Honda | 2020-09-15 |
| 10763123 | Method for processing workpiece | Yoshihide Kihara | 2020-09-01 |
| 10714340 | Method for processing workpiece | Yoshihide Kihara, Tomoyuki Oishi | 2020-07-14 |
| 10707100 | Processing method and plasma processing apparatus | Masahiro Tabata | 2020-07-07 |
| 10559472 | Workpiece processing method | Masahiro Tabata, Yoshihide Kihara | 2020-02-11 |
| 10553446 | Method of processing target object | Yoshihide Kihara, Masahiro Tabata | 2020-02-04 |
| 10504745 | Method for processing target object | Yoshihide Kihara, Masanobu Honda | 2019-12-10 |
| 10504741 | Semiconductor manufacturing method and plasma processing apparatus | Michiko Nakaya, Masanobu Honda, Masahiro Tabata | 2019-12-10 |
| 10381236 | Method of processing target object | Yoshihide Kihara, Masahiro Tabata | 2019-08-13 |
| 10233535 | Plasma processing apparatus and plasma processing method | Yoshihide Kihara, Masanobu Honda | 2019-03-19 |
| 9911607 | Method of processing target object | Yoshihide Kihara | 2018-03-06 |
| 9911622 | Method of processing target object | Yoshihide Kihara, Tomoyuki Oishi, Masanobu Honda | 2018-03-06 |
| 9859126 | Method for processing target object | Yoshihide Kihara, Tomoyuki Oishi | 2018-01-02 |
| 9721766 | Method for processing target object | Yoshihide Kihara, Masanobu Honda, Tomoyuki Oishi | 2017-08-01 |
| 9607811 | Workpiece processing method | Yoshihide Kihara, Masanobu Honda | 2017-03-28 |
| 9524876 | Plasma etching method and plasma etching apparatus | Masanobu Honda | 2016-12-20 |
| 9330935 | Plasma etching method and plasma etching apparatus | Masanobu Honda, Yoshihide Kihara | 2016-05-03 |