Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7227624 | Method and apparatus for monitoring the condition of plasma equipment | Thomas Windhorn | 2007-06-05 |
| 7186313 | Plasma chamber wall segment temperature control | Andrej Mitrovic, Maolin Long, Paul Moroz, William Jones | 2007-03-06 |
| 7166170 | Cylinder-based plasma processing system | — | 2007-01-23 |
| 7163603 | Plasma source assembly and method of manufacture | — | 2007-01-16 |
| 7147793 | Method of and apparatus for tailoring an etch profile | — | 2006-12-12 |
| 7143887 | Multi-position stop mechanism | — | 2006-12-05 |
| 7110110 | Sensing component used to monitor material buildup and material erosion of consumables by optical emission | — | 2006-09-19 |
| 7088046 | Integrated process tube and electrostatic shield, assembly thereof and manufacture thereof | — | 2006-08-08 |
| 7064812 | Method of using a sensor gas to determine erosion level of consumable system components | Audunn Ludviksson | 2006-06-20 |
| 7040032 | Method and device for measuring whether a process kit part meets a prescribed tolerance | — | 2006-05-09 |
| 7005842 | Probe cartridge assembly and multi-probe assembly | Thomas Windhorn | 2006-02-28 |
| 7001482 | Method and apparatus for improved focus ring | Michael Landis | 2006-02-21 |
| 6963043 | Asymmetrical focus ring | — | 2005-11-08 |
| 6962348 | Sealing apparatus having a single groove | — | 2005-11-08 |
| 6960887 | Method and apparatus for tuning a plasma reactor chamber | Eric J. Strang, Wayne Johnson, Robert Hostetler | 2005-11-01 |
| 6942222 | Seal for sealing and load bearing a process tube in a vacuum system | — | 2005-09-13 |
| 6887341 | Plasma processing apparatus for spatial control of dissociation and ionization | Eric J. Strang, Paul Moroz | 2005-05-03 |
| 6786795 | Remote-controlled tractor trailer toy | Sean Mullaney, Michael G. Hoeting, Neil Hamilton, Tommie Lucas, Robert Spalinski +1 more | 2004-09-07 |
| D466167 | Tractor-trailer toy vehicle | Sean Mullaney, Michael G. Hoeting, Neil Hamilton, Tommie Lucas, Truman John Gilbert +1 more | 2002-11-26 |