Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6309116 | Substrate processing system | Koji Mahara, Hiroyuki Kudou, Issei Ueda | 2001-10-30 |
| 6238107 | Developing apparatus | — | 2001-05-29 |
| 6063190 | Method of forming coating film and apparatus therefor | Keizo Hasebe, Akihiro Fujimoto, Hiroyuki Iino, Shinzi Kitamura, Masatoshi Deguchi +1 more | 2000-05-16 |
| 5942035 | Solvent and resist spin coating apparatus | Keizo Hasebe, Akihiro Fujimoto, Hiroyuki Iino, Shinzi Kitamura, Masatoshi Deguchi +1 more | 1999-08-24 |
| 5658615 | Method of forming coating film and apparatus therefor | Keizo Hasebe, Akihiro Fujimoto, Hiroyuki Iino, Shinzi Kitamura, Masatoshi Deguchi +1 more | 1997-08-19 |
| 5625433 | Apparatus and method for developing resist coated on a substrate | Kunie Tsunematsu | 1997-04-29 |