Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6065447 | Idle speed control device for internal combustion engine | Tomio Hokari | 2000-05-23 |
| 6053983 | Wafer for carrying semiconductor wafers and method detecting wafers on carrier | Teruo Asakawa | 2000-04-25 |
| 5934856 | Multi-chamber treatment system | Teruo Asakawa | 1999-08-10 |
| 5857827 | Cassette chamber | Teruo Asakawa, Yoji IIZUKA, Keiichi Matsushima | 1999-01-12 |
| 5740034 | Positioning apparatus and process system having the same | — | 1998-04-14 |
| 5557215 | Self-bias measuring method, apparatus thereof and electrostatic chucking apparatus | Masaki Kondo | 1996-09-17 |
| 5484013 | Heat sink fan | Fumihiro Morikawa | 1996-01-16 |
| 5460684 | Stage having electrostatic chuck and plasma processing apparatus using same | Teruo Asakawa, Noboru Masuoka, Masaki Kondo | 1995-10-24 |
| 5455082 | Reduced pressure processing system and reduced pressure processing method | Masasi Saito, Teruo Iwata, Nobuo Ishii, Towl Ikeda | 1995-10-03 |
| 5314541 | Reduced pressure processing system and reduced pressure processing method | Masasi Saito, Teruo Iwata, Nobuo Ishii, Towl Ikeda | 1994-05-24 |
| 5223001 | Vacuum processing apparatus | — | 1993-06-29 |
| 5188073 | Fluid control valve, valve support member therefor and idling air amount control apparatus for automobile using the fluid control valve | Yuki Ejiri, Tsutomu Okazaki, Koichiro Yamada, Chiaki Niida, Hideki Honma | 1993-02-23 |