Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9130536 | Radio frequency signal splitter and matcher | — | 2015-09-08 |
| 9087677 | Methods of electrical signaling in an ion energy analyzer | Merritt Funk, Lee Chen, Jianping Zhao, Radha Sundararajan | 2015-07-21 |
| 8847159 | Ion energy analyzer | Lee Chen, Merritt Funk, Jianping Zhao, Radha Sundararajan | 2014-09-30 |
| 8816281 | Ion energy analyzer and methods of manufacturing the same | Merritt Funk, Lee Chen, Jianping Zhao, Radha Sundararajan | 2014-08-26 |
| 8501499 | Adaptive recipe selector | Radha Sundararajan, Merritt Funk, Lee Chen | 2013-08-06 |
| 8393197 | Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassing | Joseph R. Monkowski | 2013-03-12 |
| 8237928 | Method and apparatus for identifying the chemical composition of a gas | Joseph R. Monkowski | 2012-08-07 |
| 7940395 | Method and apparatus for identifying the chemical composition of a gas | Joseph R. Monkowski | 2011-05-10 |
| 7937232 | Data timestamp management | Paxton Ming Kai Chow, Vera Alexandrova Snowball, Sophia Leonidovna Shtilman, Chalee Asavathiratham, Abhijit Majumdar +3 more | 2011-05-03 |
| 7871830 | End point detection method for plasma etching of semiconductor wafers with low exposed area | Sumer Johal, Georges J. Gorin, Sylvia Spruytte, Herve C. Kieffel | 2011-01-18 |
| 7757541 | Techniques for calibration of gas flows | Joseph R. Monkowski | 2010-07-20 |
| 7695984 | Use of modeled parameters for real-time semiconductor process metrology applied to semiconductor processes | Joseph R. Monkowski | 2010-04-13 |
| 6796270 | Device for producing PCVD coated glass tubes for the drawing of optical fibers | Keith Leonard House, William Brashear Mattingly, III | 2004-09-28 |
| 5256854 | Tunable plasma method and apparatus using radio frequency heating and electron beam irradiation | Leslie Bromberg, Daniel R. Cohn, William C. Guss, Donna L. Smatlak | 1993-10-26 |
| 5061838 | Toroidal electron cyclotron resonance reactor | Herbert H. Sawin, Donna L. Smatlak | 1991-10-29 |