Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401202 | Method and apparatus for gas flow control | James Franklin, Jiuyi Cheng, Tao Ding, Andrey Shmakov, Travis Owens | 2019-09-03 |
| 9983595 | Method and apparatus for gas flow control | Adam J. Monkowski, Jialing Li Chen, Tao Ding | 2018-05-29 |
| 9904297 | Method and apparatus for gas flow control | Adam J. Monkowski, Jialing Li Chen, Tao Ding | 2018-02-27 |
| 9523435 | Method and apparatus for gas flow control | Adam J. Monkowski, Jialing Li Chen, Tao Ding | 2016-12-20 |
| 9400004 | Transient measurements of mass flow controllers | Adam J. Monkowski, Jialing Li Chen, Tao Ding | 2016-07-26 |
| 8857456 | Method and apparatus for in situ testing of gas flow controllers | Jialing Li Chen, Tao Ding, James MacAllen Chalmers | 2014-10-14 |
| 8667830 | Method and apparatus for in situ testing of gas flow controllers | Jialing Li Chen, Tao Ding, James MacAllen Chalmers | 2014-03-11 |
| 8393197 | Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassing | Barton Lane | 2013-03-12 |
| 8271210 | Method and apparatus for enhancing in-situ gas flow measurement performance | Sherk Chung, James MacAllen Chalmers, Jialing Li Chen, Yi Wang, Paul Tran +1 more | 2012-09-18 |
| 8271211 | Method and apparatus for enhancing in-situ gas flow measurement performance | Sherk Chung, James MacAllen Chalmers, Jialing Li Chen, Yi Wang, Paul Tran +1 more | 2012-09-18 |
| 8265888 | Method and apparatus for enhancing in-situ gas flow measurement performance | Sherk Chung, James MacAllen Chalmers, Jialing Li Chen, Yi Wang, Paul Tran +1 more | 2012-09-11 |
| 8240324 | Method and apparatus for in situ testing of gas flow controllers | Jialing Li Chen, Tao Ding, James MacAllen Chalmers | 2012-08-14 |
| 8237928 | Method and apparatus for identifying the chemical composition of a gas | Barton Lane | 2012-08-07 |
| 7940395 | Method and apparatus for identifying the chemical composition of a gas | Barton Lane | 2011-05-10 |
| 7873052 | System and method for controlling process end-point utilizing legacy end-point system | Sherk Chung, Tomislav Lozic, Geoffrey Rodney Wong | 2011-01-18 |
| 7823436 | Method and apparatus for in situ testing of gas flow controllers | Jialing Li Chen, Tao Ding, James MacAllen Chalmers | 2010-11-02 |
| 7757541 | Techniques for calibration of gas flows | Barton Lane | 2010-07-20 |
| 7695984 | Use of modeled parameters for real-time semiconductor process metrology applied to semiconductor processes | Barton Lane | 2010-04-13 |
| 7590498 | System and method for vacuum chamber leak detection | Sherk Chung, Mukund Chakravarthy Venkatesh, Paxton Ming Kai Chow, Jiuyi Cheng, Paul Tran | 2009-09-15 |
| 5722158 | Method of manufacture and resulting thermoelectric module | Robert Erich Fritz | 1998-03-03 |
| 5515238 | Thermoelectric module having reduced spacing between semiconductor elements | Robert Erich Fritz | 1996-05-07 |
| 5434744 | Thermoelectric module having reduced spacing between semiconductor elements | Robert Erich Fritz | 1995-07-18 |
| 5294778 | CVD platen heater system utilizing concentric electric heating elements | Justice N. Carman, Mark A. Logan | 1994-03-15 |
| 5104482 | Simultaneous glass deposition and viscoelastic flow process | Mark A. Logan, Lloyd Wright | 1992-04-14 |
| 5091219 | Chemical vapor deposition method | Mark A. Logan | 1992-02-25 |