Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7041515 | Balancing planarization of layers and the effect of underlying structure on the metrology signal | Xinhui Niu | 2006-05-09 |
| 7031894 | Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratings | Xinhui Niu | 2006-04-18 |
| 6961679 | Method and system of dynamic learning through a regression-based library generation process | Xinhui Niu | 2005-11-01 |
| 6952271 | Caching of intra-layer calculations for rapid rigorous coupled-wave analyses | Xinhui Niu | 2005-10-04 |
| 6943900 | Generation of a library of periodic grating diffraction signals | Xinhui Niu | 2005-09-13 |
| 6928395 | Method and system for dynamic learning through a regression-based library generation process | Xinhui Niu | 2005-08-09 |
| 6891626 | Caching of intra-layer calculations for rapid rigorous coupled-wave analyses | Xinhui Niu | 2005-05-10 |
| 6855464 | Grating test patterns and methods for overlay metrology | Xinhui Niu | 2005-02-15 |
| 6839145 | Optical profilometry of additional-material deviations in a periodic grating | Xinhui Niu | 2005-01-04 |
| 6833914 | System and method for efficient simulation of reflectometry response from two-dimensional grating structures | Junwei Bao, Xinhui Niu | 2004-12-21 |
| 6792328 | Metrology diffraction signal adaptation for tool-to-tool matching | Michael Laughery, David Wasinger | 2004-09-14 |
| 6785638 | Method and system of dynamic learning through a regression-based library generation process | Xinhui Niu | 2004-08-31 |
| 6772084 | Overlay measurements using periodic gratings | Joerg Bischoff, Xinhui Niu | 2004-08-03 |
| 6768983 | System and method for real-time library generation of grating profiles | Michael Laughery | 2004-07-27 |
| 6750961 | System and method for characterizing macro-grating test patterns in advanced lithography and etch processes | Xinhui Niu | 2004-06-15 |
| 6743646 | Balancing planarization of layers and the effect of underlying structure on the metrology signal | Xinhui Niu | 2004-06-01 |
| 6721691 | Metrology hardware specification using a hardware simulator | Junwei Bao | 2004-04-13 |
| 6699624 | Grating test patterns and methods for overlay metrology | Xinhui Niu | 2004-03-02 |
| 6645824 | Combined optical profilometry and projection microscopy of integrated circuit structures | Wenge Yang, Junwei Bao, Xinhui Niu, Yasuhiro Okumoto | 2003-11-11 |
| 6636843 | System and method for grating profile classification | Srinivas Doddi, Xinhui Niu | 2003-10-21 |
| 6609086 | Profile refinement for integrated circuit metrology | Junwei Bao, Srinivas Doddi, Vi Vuong | 2003-08-19 |
| 6608686 | Measurement of metal electroplating and seed layer thickness and profile | Lawrence Lane, Xinhui Niu | 2003-08-19 |
| 6608690 | Optical profilometry of additional-material deviations in a periodic grating | Xinhui Niu | 2003-08-19 |
| 6538731 | System and method for characterizing macro-grating test patterns in advanced lithography and etch processes | Xinhui Niu | 2003-03-25 |
| 6433878 | Method and apparatus for the determination of mask rules using scatterometry | Xinhui Niu | 2002-08-13 |