Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11913772 | Non-destructive gap metrology | Jianyong Mo, V Wade Singleton, Yiren Wu, Liang Zhang | 2024-02-27 |
| 6792328 | Metrology diffraction signal adaptation for tool-to-tool matching | Michael Laughery, Nickhil Jakatdar | 2004-09-14 |