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Optical inspection tool and inspection method for inspecting multifaceted groove specimens |
Fan Fan, Liang Zhang |
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Apparatuses and methods for inspecting embedded features |
Jacob Chesna, Liang Zhang, Fan Fan |
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| 11913772 |
Non-destructive gap metrology |
V Wade Singleton, Yiren Wu, Liang Zhang, David Wasinger |
2024-02-27 |
| 11644757 |
Method to achieve tilted patterning with a through resist thickness using projection optics |
Changhua Liu, Liang Zhang |
2023-05-09 |
| 10794840 |
Apparatus for semiconductor package inspection |
Liang Zhang, Darren Vance, Di Xu, Gregory S. Clemons, Robert F. Wiedmaier |
2020-10-06 |
| 10401286 |
Reflectivity analysis to determine material on a surface |
Darren Vance, Di Xu, Liang Zhang |
2019-09-03 |