Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399135 | Optical inspection tool and inspection method for inspecting multifaceted groove specimens | Fan Fan, Liang Zhang | 2025-08-26 |
| 12216301 | Apparatuses and methods for inspecting embedded features | Jacob Chesna, Liang Zhang, Fan Fan | 2025-02-04 |
| 11913772 | Non-destructive gap metrology | V Wade Singleton, Yiren Wu, Liang Zhang, David Wasinger | 2024-02-27 |
| 11644757 | Method to achieve tilted patterning with a through resist thickness using projection optics | Changhua Liu, Liang Zhang | 2023-05-09 |
| 10794840 | Apparatus for semiconductor package inspection | Liang Zhang, Darren Vance, Di Xu, Gregory S. Clemons, Robert F. Wiedmaier | 2020-10-06 |
| 10401286 | Reflectivity analysis to determine material on a surface | Darren Vance, Di Xu, Liang Zhang | 2019-09-03 |