Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D981195 | Film applicator tool | Wenjun Xu | 2023-03-21 |
| 7815738 | Deposition tool cleaning process having a moving plasma zone | Ignacio Blanco, Nathan Kruse | 2010-10-19 |
| 7799632 | Method of forming an isolation structure by performing multiple high-density plasma depositions | Manuel Quevedo-Lopez, Louis H. Breaux | 2010-09-21 |
| 7524777 | Method for manufacturing an isolation structure using an energy beam treatment | Puneet Kohli, Manoj Mehrotra, Sameer Ajmera | 2009-04-28 |
| 7465635 | Method for manufacturing a gate sidewall spacer using an energy beam treatment | Puneet Kohli, Manoj Mehrotra, Sameer Ajmera | 2008-12-16 |
| 7423344 | Bi-layer etch stop process for defect reduction and via stress migration improvement | Tae Seung Kim, Nathan Kruse, August Fischer, Ralf B. Willecke | 2008-09-09 |
| 7199047 | Bi-layer etch stop process for defect reduction and via stress migration improvement | Tae Seung Kim, Nathan Kruse, August Fischer, Ralf B. Willecke | 2007-04-03 |
| 7112546 | Method of manufacturing semiconductor devices comprising a deposition tool cleaning process having a moving plasma zone | Ignacio Blanco, Nathan Kruse | 2006-09-26 |
| 6998275 | Hydrogen-less CVD TiN process for FeRAM VIA0 barrier application | M. Grant Albrecht, Qidu Jiang, Linlin Chen | 2006-02-14 |
| 6734099 | System for preventing excess silicon consumption in ultra shallow junctions | Jiong-Ping Lu, Yuqing Xu | 2004-05-11 |
| 6630394 | System for reducing silicon-consumption through selective deposition | Jiong-Ping Lu, Yuqing Xu | 2003-10-07 |
| 6277744 | Two-level silane nucleation for blanket tungsten deposition | Ting YUAN, Bob Anderson, Clive Jones | 2001-08-21 |
| 6248603 | Method of measuring dielectric layer thickness using SIMS | Clive Jones | 2001-06-19 |