Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8551248 | Showerhead for CVD depositions | Brian E. Goodlin | 2013-10-08 |
| 8551890 | Showerhead for CVD depositions | Brian E. Goodlin | 2013-10-08 |
| 6998275 | Hydrogen-less CVD TiN process for FeRAM VIA0 barrier application | Jin Zhao, M. Grant Albrecht, Linlin Chen | 2006-02-14 |