Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521879 | Load port apparatus, semiconductor manufacturing apparatus, and method of controlling atmosphere in pod | Tatsuhiro KOTSUGAI, Takeshi Kagaya | 2022-12-06 |
| 11199528 | Sensor built-in filter structure and wafer accommodation container | Tatsuhiro KOTSUGAI, Takeshi Kagaya | 2021-12-14 |
| 10276415 | Gas purge unit | Takuya Kudo | 2019-04-30 |
| 9543177 | Pod and purge system using the same | Tadamasa Iwamoto, Jun Emoto | 2017-01-10 |
| 9536765 | Load port unit and EFEM system | Tadamasa Iwamoto, Jun Emoto, Hidenori TSUTSUI | 2017-01-03 |
| 9153468 | Load port apparatus | Jun Emoto, Tadamasa Iwamoto | 2015-10-06 |
| 8978718 | Purge device and load port apparatus including the same | Jun Emoto, Tadamasa Iwamoto | 2015-03-17 |
| 8979463 | Load port apparatus | Hiroshi Igarashi | 2015-03-17 |
| 8876173 | Substrate storage pod and lid opening/closing system for the same | Hiroshi Igarashi, Tsutomu Okabe | 2014-11-04 |
| 8657346 | Lid opening/closing system for closed container | Tsutomu Okabe, Hiroshi Igarashi | 2014-02-25 |
| 8562273 | Load port apparatus | Hiroshi Igarashi | 2013-10-22 |
| 8528947 | Closed container and lid opening/closing system therefor | Hiroshi Igarashi, Tsutomu Okabe | 2013-09-10 |
| 8522836 | Substrate storage pod with replacement function of clean gas | Tsutomu Okabe | 2013-09-03 |
| 8322759 | Closed container and lid opening/closing system therefor | Tsutomu Okabe, Hiroshi Igarashi | 2012-12-04 |
| 8251636 | Lid closing method for closed container and lid opening/closing system for closed container | Mutsuo Sasaki | 2012-08-28 |
| 8186927 | Contained object transfer system | Tsutomu Okabe, Hiroshi Igarashi | 2012-05-29 |
| 8083456 | Contained object transfer system | Tsutomu Okabe | 2011-12-27 |
| 8061738 | Gas replacement system | Tsutomu Okabe, Hitoshi Suzuki | 2011-11-22 |
| 8029227 | Dust resistant load port apparatus and mini-environment system | Hitoshi Suzuki | 2011-10-04 |
| 7927058 | Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port | Jun Emoto, Hidetoshi Horibe | 2011-04-19 |
| 7748942 | Dust resistant load port apparatus and mini-environment system | Hitoshi Suzuki | 2010-07-06 |
| 7674083 | Clean device with clean box-opening/closing device | Shigeki Ishiyama | 2010-03-09 |
| 7654291 | Purging apparatus and purging method | Hiroshi Igarashi, Hitoshi Suzuki | 2010-02-02 |
| 7621714 | Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit | Tsutomu Okabe, Jun Emoto | 2009-11-24 |
| 7523769 | Enclosed container lid opening/closing system and enclosed container lid opening/closing method | Hitoshi Suzuki, Hiroshi Igarashi | 2009-04-28 |