Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7379174 | Wafer detecting device | Tsutomu Okabe, Mutsuo Sasaki | 2008-05-27 |
| 7360985 | Wafer processing apparatus including clean box stopping mechanism | Tsutomu Okabe, Hiroshi Igarashi | 2008-04-22 |
| 7360346 | Purging system and purging method for the interior of a portable type hermetically sealed container | Takeshi Kagaya, Hitoshi Suzuki, Mutsuo Sasaki | 2008-04-22 |
| 6984839 | Wafer processing apparatus capable of mapping wafers | Hiroshi Igarashi, Tsutomu Okabe | 2006-01-10 |
| 6883770 | Load port mounting mechanism | Hiroshi Igarashi, Tsutomu Okabe | 2005-04-26 |
| 6796763 | Clean box, clean transfer method and system | Tsutomu Okabe | 2004-09-28 |
| 6641349 | Clean box, clean transfer method and system | Tsutomu Okabe | 2003-11-04 |
| 6561894 | Clean box, clean transfer method and apparatus therefor | — | 2003-05-13 |
| 6430802 | Clean box, clean transfer method and apparatus therefor | — | 2002-08-13 |
| 6390145 | Container and method for sealing the container | Tsutomu Okabe, Hiroshi Igarashi | 2002-05-21 |
| 6199604 | Clean box, clean transfer method and apparatus therefor | — | 2001-03-13 |
| 6168364 | Vacuum clean box, clean transfer method and apparatus therefor | — | 2001-01-02 |
| 6136168 | Clean transfer method and apparatus therefor | Sho Masujima, Eisaku Miyauchi, Hideaki Watanabe | 2000-10-24 |
| 6062808 | Clean transfer method and apparatus therefor | Sho Masujima, Eisaku Miyauchi, Hideaki Watanabe | 2000-05-16 |
| 5730573 | Clean transfer method and apparatus therefor | Sho Masujima, Eisaku Miyauchi, Hideaki Watanabe | 1998-03-24 |
| 5364219 | Apparatus for clean transfer of objects | Tetsuo Takahashi, Eisaku Miyauchi, Hideaki Watanabe | 1994-11-15 |
| 5139459 | Clean transfer method and system therefor | Tetsuo Takahashi, Eisaku Miyauchi | 1992-08-18 |