Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521879 | Load port apparatus, semiconductor manufacturing apparatus, and method of controlling atmosphere in pod | Tatsuhiro KOTSUGAI, Toshihiko Miyajima | 2022-12-06 |
| 11199528 | Sensor built-in filter structure and wafer accommodation container | Tatsuhiro KOTSUGAI, Toshihiko Miyajima | 2021-12-14 |
| 7360346 | Purging system and purging method for the interior of a portable type hermetically sealed container | Toshihiko Miyajima, Hitoshi Suzuki, Mutsuo Sasaki | 2008-04-22 |
| 6795202 | Wafer processing apparatus having wafer mapping function | Jun Emoto, Kazuo Yamazaki | 2004-09-21 |