| 11446713 |
Gas purge unit and load port apparatus |
Tadamasa Iwamoto |
2022-09-20 |
| 10512948 |
Gas purge unit and gas purge apparatus |
Tadamasa Iwamoto |
2019-12-24 |
| 9929033 |
Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method |
Tadamasa Iwamoto |
2018-03-27 |
| 9833817 |
Gas purge unit, load port apparatus, and installation stand for purging container |
Mutsuo Sasaki, Hiroshi Igarashi |
2017-12-05 |
| 9786531 |
Gas purge unit, load port apparatus, and installation stand for purging container |
Mutsuo Sasaki, Hiroshi Igarashi |
2017-10-10 |
| 9543177 |
Pod and purge system using the same |
Toshihiko Miyajima, Tadamasa Iwamoto |
2017-01-10 |
| 9536765 |
Load port unit and EFEM system |
Tadamasa Iwamoto, Toshihiko Miyajima, Hidenori TSUTSUI |
2017-01-03 |
| 9349627 |
Lid opening/closing system for closed container and substrate processing method using same |
Tsutomu Okabe |
2016-05-24 |
| 9153468 |
Load port apparatus |
Tadamasa Iwamoto, Toshihiko Miyajima |
2015-10-06 |
| 8978718 |
Purge device and load port apparatus including the same |
Tadamasa Iwamoto, Toshihiko Miyajima |
2015-03-17 |
| 8302637 |
Method of processing an object in a container and lid opening/closing system used in the method |
Tsutomu Okabe, Tomoshi Abe |
2012-11-06 |
| 8234002 |
Closed container and control system for closed container |
Tomoshi Abe |
2012-07-31 |
| 7927058 |
Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port |
Toshihiko Miyajima, Hidetoshi Horibe |
2011-04-19 |
| 7789609 |
Lid opening/closing system for closed container and substrate processing method using same |
Tsutomu Okabe |
2010-09-07 |
| 7621714 |
Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit |
Toshihiko Miyajima, Tsutomu Okabe |
2009-11-24 |
| 6795202 |
Wafer processing apparatus having wafer mapping function |
Takeshi Kagaya, Kazuo Yamazaki |
2004-09-21 |
