Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10566227 | Controlling method for a wafer transportation part and a load port part on an EFEM | Tsutomu Okabe | 2020-02-18 |
| 10340157 | Mini-environment apparatus | Tsutomu Okabe | 2019-07-02 |
| 10304702 | EFEM | Tsutomu Okabe | 2019-05-28 |
| 7927058 | Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port | Toshihiko Miyajima, Jun Emoto | 2011-04-19 |