Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699228 | Arrangement detector for plate-shaped object and load port including same | Tomoshi Abe, Takuya Kudo | 2023-07-11 |
| 11646215 | Load port apparatus and method of driving the same | Tomoshi Abe, Hiroshi Hasegawa, Nozomu Kato, Hiroshi Igarashi | 2023-05-09 |
| 11446713 | Gas purge unit and load port apparatus | Jun Emoto | 2022-09-20 |
| 11276599 | Load port apparatus, EFEM, and method of installing load port apparatus | Takuya Kudo | 2022-03-15 |
| 11273472 | Bottom gas purge unit, load port apparatus, and bottom gas purge method | — | 2022-03-15 |
| 11145528 | Load port apparatus and method of mounting container | — | 2021-10-12 |
| 11004714 | Load port | Takuya Kudo | 2021-05-11 |
| 10665488 | Load port apparatus and method of driving the same | Hiroshi Igarashi | 2020-05-26 |
| 10512948 | Gas purge unit and gas purge apparatus | Jun Emoto | 2019-12-24 |
| 9929033 | Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method | Jun Emoto | 2018-03-27 |
| 9895723 | Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method | — | 2018-02-20 |
| 9607871 | EFEM system and lid opening/closing method | — | 2017-03-28 |
| 9543177 | Pod and purge system using the same | Toshihiko Miyajima, Jun Emoto | 2017-01-10 |
| 9536765 | Load port unit and EFEM system | Jun Emoto, Toshihiko Miyajima, Hidenori TSUTSUI | 2017-01-03 |
| 9153468 | Load port apparatus | Jun Emoto, Toshihiko Miyajima | 2015-10-06 |
| 8978718 | Purge device and load port apparatus including the same | Jun Emoto, Toshihiko Miyajima | 2015-03-17 |