Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11646215 | Load port apparatus and method of driving the same | Tomoshi Abe, Hiroshi Hasegawa, Hiroshi Igarashi, Tadamasa Iwamoto | 2023-05-09 |
| 9824907 | Gas purge apparatus, load port apparatus, and gas purge method | Hiroshi Igarashi, Tomoshi Abe | 2017-11-21 |